Berlin 2024 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
O: Fachverband Oberflächenphysik
O 59: Oxide and Insulator Interfaces II
O 59.5: Vortrag
Mittwoch, 20. März 2024, 16:00–16:15, MA 144
Bare and Pd-doped ceria thin films prepared by ALD and EBE for hydrogen detection — •Yuliia Kosto1, Paulina Kapuscik2, Rudi Tschammer1, Dominic Guttmann1, Ewa Mankowska2, Peter Matvija3, Carlos Morales1, Michal Mazur2, Karsten Henkel1, Iva Matolinova3, Jaroslaw Domaradzki2, and Jan Ingo Flege1 — 1BTU Cottbus-Senftenberg, Appl Phys & Semicond Spect, Cottbus, Germany — 2Wroclaw Univ Sci & Technol, Fac Elect Photon & Microsyst, Wroclaw, Poland — 3Charles Univ, Dept Surface & Plasma Sci, Prague , Czech
The need to store and use hydrogen safely as part of green economy based on renewable energy evokes a necessity to reliably detect it at ambient conditions. The majority of currently used sensors are working at elevated temperatures (200-500 °C). In this work, we demonstrate that ceria films deposited on a commercial electrode by atomic layer deposition (ALD) and electron beam evaporation (EBE) electrically respond to hydrogen (from 20 to 500 ppm) at much lower temperatures (50-200 °C). The results reveal that <1.5 nm thin Pd adlayer increases the electrical response by several orders of magnitude for both ceria films. The NAP-XPS study under changing oxidative/reductive atmospheres sheds light on the mechanism of Pd-CeOx thermal activation and the role of the deposition technique in the reactivity of the oxide.
Keywords: ceria; thin film; hydrogen detection; sensor; XPS