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O: Fachverband Oberflächenphysik

O 92: Nanostructures at Surfaces II

O 92.8: Vortrag

Donnerstag, 21. März 2024, 16:45–17:00, MA 042

Dimensional reconstruction of nanoscale grating profile in hybrid approach — •Leonhard Merlin Lohr, Richard Ciesielski, Vinh-Binh Truong, Frank Scholze, and Victor Soltwisch — Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, Germany

Quality assessment of nanoscale test structures in the semiconductor industry is crucial for the fabrication of devices, such as advanced transistors. The shape of test structures, like nanoscale line gratings, needs to be described with sub-nanometer accuracy. A fast and non-destructive characterization technique is scatterometry, which uses short-wavelength radiation to resolve features of the nanoscale grating. Synchrotron radiation, with its high beam quality probing the structured surface, can be employed to develop the characterization method. A nanoscale grating can be characterized through both soft X-ray scattering and fluorescence. The soft X-ray standing wave field at the structure profile from radiation-surface interaction can be solved using a finite element Maxwell solver and Markov chain Monte Carlo sampling to derive the grating's shape, including uncertainties.

This method is suitable for investigating the potential to enhance reconstruction accuracy by combining complementary measurements in a hybrid measurement scheme. This is illustrated through measurements conducted with a recently presented experimental scattering chamber [1].

[1] R. Ciesielski, L. M. Lohr, A. Fernández Herrero, et al., Rev. Sci. Instrum. 1 Jan 2023; 94 (1): 013904.

Keywords: nanometrology; synchrotron radiation; finite element method; inverse problem; uncertainty quantification