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TT: Fachverband Tiefe Temperaturen

TT 18: Superconductivity: Poster

TT 18.63: Poster

Monday, March 18, 2024, 15:00–18:00, Poster C

Advances in microfabrication of Metallic Magnetic Calorimeters — •Daniel Kreuzberger, Andreas Reifenberger, Andreas Abeln, Alexander Orlow, Daniel Hengstler, Andreas Fleischmann, and Christian Enss — Heidelberg University

Metallic Magnetic Calorimeters (MMCs) are low temperature particle detectors which can reliably be produced with multilayer microfabrication techniques. Moreover, the consequent use of these techniques allows for the fabrication of thousands of virtually identical detectors as required for large, dense packed arrays. Using various examples of current MMC detectors which are actively used for high resolution x-ray spectroscopy, we present the status of our microfabrication processes. This includes the fabrication of overhanging x-ray absorbers made of gold with a thickness up to 100   µ m. For this, a newly developed fabrication process is presented, preventing almost all athermal phonons from escaping in the substrate without thermalization in the sensor. We also discuss copper filled Through-Silicon-Vias (TSV) used to heatsink the detector pixels to the wafer backside.

Keywords: Microfabrication; Metallic Magnetic Calorimeter; Cryogenic Detector; x-ray Spectroscopy