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TT: Fachverband Tiefe Temperaturen
TT 47: Superconducting Electronics: Qubits I (joint session TT/QI)
TT 47.12: Vortrag
Mittwoch, 20. März 2024, 17:45–18:00, H 0104
Frequency targeting and geometric effects in fabrication of superconducting tunable resonators — •Maria-Teresa Handschuh1,2, Kedar E. Honasoge1,2, Wun Yam1,2, Florian Fesquet1,2, Achim Marx1, Rudolf Gross1,2,3, and Kirill G. Fedorov1,2,3 — 1Walther-Meißner-Institut, Bayerische Akademie der Wissenschaften, 85748 Garching, Germany — 2School of Natural Sciences, Technical University of Munich, 85748 Garching, Germany — 3Munich Center for Quantum Science and Technology, 80799 Munich, Germany
Achieving a high-volume and high-quality fabrication process of uniform nonlinear resonators based on Josephson junctions is one of the central challenges in applied quantum information processing with superconductors. Here, we report on the realization of a reliable fabrication process for Nb resonators with Al/AlOx/Al Josephson junctions and circuits on 4-inch high-resistivity silicon wafers, ensuring precise control over relevant parameters. We address the challenges associated with the large-scale fabrication by investigating the impact of geometric irregularities on device performance, including finite-size geometry effects and center-to-edge effects. Undesired frequency shifts can arise from variations in device dimensions and inhomogeneous oxidation techniques. We overcome these challenges by a systematic analysis, allowing us to improve the controllability and accuracy of resonator frequency tuning. This enables the reproducible fabrication of low-loss tunable resonators for quantum information processing applications.
Keywords: Josephson junction based devices; Nonlinear resonators; Wafer-scale fabrication