Freiburg 2024 – scientific programme
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Q: Fachverband Quantenoptik und Photonik
Q 36: Quantum Metrology and Interference
Q 36.8: Talk
Wednesday, March 13, 2024, 16:15–16:30, HS 3219
Lateral shear interferometry for shape accuracy measurements of 3D-printed micro-optics — •Yanqiu Zhao1,2, Leander Siegle1,2, and Harald Giessen1,2 — 14th Physics Institute, University of Stuttgart, Stuttgart, Germany — 2Stuttgart Research Center of Photonic Engineering, Stuttgart, Germany
We compare several methods of lateral shear interferometry to assess the shape accuracy of 3D-printed micro-optics. Different aberrations are added deliberately to the lens design of the 3D-printed micro-optics and accuracy of the interferometric methods is evaluated. Accuracies up to lambda/100 can be reached for micro-optics with 140 micrometer diameter and around 570 micrometer focal lengths. Using gray scale lithography, 3D-printing aspherical singlets with RMS wavefront aberrations of only 0.01 lambda is realizable.
Keywords: Lateral shear interferometry; 3D-printed micro-optics; Wave front sensing; Wave front aberrations; Gray scale lithography