Freiburg 2024 – wissenschaftliches Programm

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Q: Fachverband Quantenoptik und Photonik

Q 39: Poster V

Q 39.8: Poster

Mittwoch, 13. März 2024, 17:00–19:00, Aula Foyer

Fabrication of polymer multimode-waveguides with maskless lithography for quantum sensing applications. — •Lena Middel, Tjorven Annika Husmann, Sreelakshmi Sathyan Kizhekayil, Jonas Homrighausen, and Markus Gregor — Department of Engineering Physics, University of Applied Sciences, Muenster

In the world of integrated quantum optics, multimode waveguides usually represent a niche, as singlemode waveguides enable on-chip processing of light. As the production of single mode waveguides is challenging in amounts of time, equipment and cost, our approach is to use multimode waveguides on applications that do not nessecarily require single mode waveguides. One such applications is quantum sensing using solid-state defects, such as the NV-center in diamond, which can be embedded in the waveguide to read out the spin dependent fluorescence [1]. Consequently, the aim of our work is the fabrication of dielectric ridge waveguides for structuring of SU-8. This epoxy-based negative photoresist is an excellent material with high and broadband optical transmission, high aspect ratio and good mechanical, thermal and chemical stability. For prototyping, we use a maskless lithography system, that is equipped with a digital micromirror device to project the image, leaving room for adjustment of exposed structures. This work paves the way for a more efficient and scalable production of waveguides for quantum sensing applications without the need for highly sophisticated equipment.

[1] P. P. Schrinner et al., (2020). Nano Letters, 20(11), 8170-8177.

Keywords: optical waveguides; integrated optics; quantum sensing; microstructuring