Greifswald 2024 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
P: Fachverband Plasmaphysik
P 10: Atmospheric Pressure Plasmas and their Applications II
P 10.3: Vortrag
Dienstag, 27. Februar 2024, 14:45–15:00, WW 1: HS
Time-resolved ion mass spectrometry to investigate the ion chemistry of a dielectric barrier discharge — Nils Dose1, •Luka Hansen1,2, Tristan Winzer1, Christian Schulze1, and Jan Benedikt1,2 — 1Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany — 2Kiel Nano, Surface and Interface Science KiNSIS, Kiel University, Kiel, Germany
The ion chemistry plays a crucial role for many plasma chemical processes ranging from particle or thin film growth to the production of biomedical relevant species [1]. Ion mass spectrometry allows a direct measurement of the formed ions with the drawback of a limited temporal resolution due to the flight time of ions from the plasma through the filtering optics of the mass spectrometer to the detector [2].
To overcome this issue the ion mass spectrometer was equipped with a multi channel scaler which allows to measure the incoming ions with up to 10 ns resolution. The mass dependent ion flight times were determined using a (pulsed) dielectric barrier discharge usually utilized for deposition processes [3] and compared with SIMION simulations. The derived connection between flight times and mass can be used to correct the time-resolved ion measurements, therefore allowing to gain inside into the production and conversion of ions.
The diagnostic will be presented and its potential demonstrated on first measurements with N2 and O2 admixtures.
[1] P. Tosi et al., 2009 Plasma Sources Sci. Technol. 18 034005
[2] J. Benedikt et al., 2012 J. Phys. D: Appl. Phys. 45 403001
[3] L. Bröcker et al., 2023 Plasma Process. Polym. e2300177
Keywords: Delectric barrier discharge; Mass spectrometry; Ion chemistry