Greifswald 2024 – scientific programme

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P: Fachverband Plasmaphysik

P 10: Atmospheric Pressure Plasmas and their Applications II

P 10.4: Talk

Tuesday, February 27, 2024, 15:00–15:15, WW 1: HS

Tunable laser absorption spectroscopy of all four Ar*(3p⁵4s) states in a pulsed-driven dielectric barrier discharge with short gas-residence times — •Levin Krös, Hans Höft, Andy Nave, Jean-Pierre van Helden, and Ronny Brandenburg — Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

Dielectric Barrier Discharges (DBDs) can be applied for plasma enhanced chemical vapour deposition processes, i.e. for the deposition of thin functional films. In case of short gas-residence times realised by e.g. high working gas flows, ions play an important role in the deposition process. A significant production channel for ionic species is provided by excited argon species, especially the metastable states, via Penning ionisation. Therefore, tunable laser absorption spectroscopy is utilized to measure absolute number density of the four lowest energetic excited states of argon. The ability to determine the number density all four Ar*(3p⁵4s) states as a function of the operation parameters, like gas flow and characteristics of the applied high-voltage pulse, is especially valuable for a comparison with numerical models. As a starting point, the number densities of these states will be measured in a pulsed-driven DBD with 3 mm gas gap flushed with pure argon at atmospheric pressure.

Keywords: Dielectric barrier discharge; Pulsed operation; Absorption spectroscopy; Argon metastable; Short gas-residence times