Greifswald 2024 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 25: Poster III
P 25.16: Poster
Donnerstag, 29. Februar 2024, 16:30–18:30, ELP 6: Foyer
A high power, galvanically isolated power supply for current drive in the STØR experiment — •Sebastian Haag1, Nils Fahrenkamp1, Stefan Knauer1, Simone Mannori2, Alessandro Lampasi2, and Peter Manz1 — 1Institute of Physics University of Greifswald, Greifswald, Germany — 2ENEA, Rome, Italy
Extreme Ultraviolet (EUV) lithography is a crucial technology for projecting high-resolution patterns onto silicon wafers, enabling the production of smaller and more powerful microchips. At the desired wavelength, lasers are no longer available as light sources, so plasma sources have to be used. Laser-produced plasmas (LPPs) prevailed as radiation source because the discharge-produced plasmas (DPPs) did not achieve the desired parameters. The STØR experiment introduces an alternative magnetic confinement concept which is particularly well suited as radiation source, as it contributes to reducing costs and size. To ignite the plasma and drive the helical plasma current, a power supply has to be designed. It is capable of applying a voltage high enough to ignite the plasma and drive currents of up to 2 kA. By utilizing Supercaps as energy storage devices, we can achieve a high power system which is galvanically isolated to minimize plasma interactions with the vessel and provide a steady input voltage over the operating time. Voltage and current are controlled via a high-side and a low-side IGBT module in a buck converter configuration. Together with a custom design of the electrodes this allows for the setup of a magnetically confined compact plasma tori without external toroidal and poloidal magnets, which are ideal properties for a radiation source.
Keywords: Supercap; IGBT; toroidal; ignition; lithography