Greifswald 2024 – scientific programme

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P: Fachverband Plasmaphysik

P 25: Poster III

P 25.17: Poster

Thursday, February 29, 2024, 16:30–18:30, ELP 6: Foyer

Influence of collisionality on the electron dynamics in CCRF discharges — •Jens Kallähn, Denis Eremin, and Ralf Peter Brinkmann — TET, Ruhr University Bochum

In this contribution we investigate the influence of the pressure on the power absorption dynamics and electron transport in an rf cylindrical magnetron plasma.

Kinetic PIC simulations were utilized to gain insight into the electron heating and transport across the magnetic field.

They revealed the Hall heating to be a new magnetized electron heating mechanism different from the Ohmic heating it was classified as before. This mechanism is caused by an electric field at the edge of the sheath during the sheath expansion and by a reversed electric field during the sheath collapse. The related new operation mode was proposed to be called "mu-mode", because of its dominance in magnetized CCRF discharges and to differentiate it from other modes in rf plasmas.

While the Hall heating is dominant at low pressures, the collisional heating mechanism prevails in the high-pressure regime with a transition region where both are important.

The reversed electric field is generated for the charge balance at the powered electrode to be maintained during the sheath collapse via enhancing the electron flux. This increase occurs due to three different mechanisms: collisionless transport of electrons due to the polarization drift, collisional drift in the reversed electric field, and collisional diffusion through Hall heating.

Keywords: magnetized plasma; electron dynamics