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Greifswald 2024 – scientific programme

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P: Fachverband Plasmaphysik

P 6: Poster I

P 6.17: Poster

Monday, February 26, 2024, 16:30–18:30, ELP 6: Foyer

Seagull - A compact helicon discharge — •Stefan Knauer, Nils Fahrenkamp, Sebastian Haag, and Peter Manz — Felix-Hausdorff-Str 6, 17489 Greifswald

The Seagull experiment is a radio-frequency powered plasma experiment with a planar double spiral antenna. The plasma forms in a cylindrical high-vacuum, within a volume of about 1dm3. It was used to study capacitively (CCP) and inductively (ICP) coupled radio-frequency discharges, e.g. by means of a microwave interferometer, electron detachment and a set of Langmuir probes. Phase transitions and instabilities in electro-negative gases were investigated, as it aims to provide insight in industrial relevant coating processes. We plan to upgrade the experiment with copper coils to add a static magnetic field to the discharge area. A static magnetic field is required for helicon discharges, which are known for their height densities. Since Seagull exhibits unusual small vessel dimensions compared to other helicon experiments (sometimes multiple meters long), a comparatively short wavelength should be sufficient and thus a low magnetic field. This parameter and diagnostic set-up might enable well diagnosed helicon discharge measurements at the size of a table-top experiment.

Keywords: capacitive discharge; inductive discharge; helicon discharge

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