Bonn 2025 – scientific programme
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Q: Fachverband Quantenoptik und Photonik
Q 76: Nanophotonics II
Q 76.4: Talk
Friday, March 14, 2025, 15:15–15:30, WP-HS
Controlling non-volatile shifts of high-Q resonances for nanobeam photonic crystal cavities — •Tim Buskasper1,2,3, Mohammad Bilal Malik1,2,3, David Lemli1,2,3, and Carsten Schuck1,2,3 — 1Department for Quantum Technology, University of Münster, Heisenbergstr. 11, Münster, 48149, Germany — 2CeNTech - Center for NanoTechnology, Heisenbergstr. 11, 48149 Münster, Germany — 3SoN - Center for Soft Nanoscience, Busso-Peus-Straße 10, 48149 Münster, Germany
Nanobeam photonic crystal cavities are critical for applications in nanoscale sensing, nonlinear optics, and light-matter interaction. However, achieving high-quality (Q) factors typically requires free-standing devices, and precise resonance tuning often relies on active elements with limited scalability.
Here, we show an order-of-magnitude improvement of Q-factors for nanobeam cavities made from tantalum pentoxide to 1.36× 105 at λ=773.2 nm without the need of releasing the device from the substrate. Additionally, we demonstrate shifting of resonances by combining advanced nanophotonic design and high-resolution lithography with laser-assisted oxidation, thus achieving resonance overlap for a large number of resonators.
This approach is not restricted to tantalum pentoxide but can be adapted for other material platforms, like silicon-nitride-on-insulators. It paves the way for realizing large arrays of identical high-Q resonators.
Keywords: Q-Factor; cavity; resonance-tuning; nanobeam