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QI: Fachverband Quanteninformation

QI 37: Poster – Quantum Information Technologies (joint session Q/QI)

QI 37.32: Poster

Thursday, March 13, 2025, 17:00–19:00, Tent

Fabrication and Characterization of Photonic Nanostructures in Diamond for Quantum Applications — •Jonathan Enßlin, Colin Sauerzapf, Oliver von Berg, Rainer Stöhr, and Jörg Wrachtrup — 3rd Institute of Physics, University of Stuttgart

The unique optical properties and long-lived spin coherence times of color centers in diamond make them a promising platform for quantum technologies [1]. This work focuses on the fabrication and characterization of photonic nanostructures, such as free-standing optical waveguides, capable to enhance collection efficiency [2] and spin-photon interaction [3]. Fabrication techniques, including anisotropic reactive ion beam etching (RIBE), were optimized to achieve precise control over waveguide dimensions and etch profiles, highlighting the advances of RIBE over inductively coupled plasma etching [4, 5]. By tailoring etching parameters, stable processes for both straight and angled etches were developed, improving reproducibility and selectivity. We investigated etch rates, angular dependencies, and mask material selectivity. These developments pave the way for creating diamond nanostructures capable of hosting color centers, ultimately facilitating their integration with optical cavities. Future work includes optical characterization of the structures and the fabrication of defect-hosting waveguides for scalable quantum devices. [1] M. Pompili et al., Science 372, 259-264, (2021) [2] M. Krumrein et al., ACS Photonics 11 (6), 2160-2170, (2024) [3] L. Childress et al., Science Advances, vol. 4, no. 1, pp. 12-18, (2021) [4] H. A. Atikian et al., APL Photonics 2 (5), 051301, (2017) [5] C. Chia et al., Opt. Express 30, 14189-14201 (2022)

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