Göttingen 2025 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 10: Poster Session I
P 10.29: Poster
Dienstag, 1. April 2025, 16:15–18:15, ZHG Foyer 1. OG
Generation and diagnostics of an inverted fireball (IFB) discharge in an rf plasma — •Viktor Schneider1, Jan Krieger1, Johannes Grünwald2, Gerhard Eichenhofer3, and Holger Kersten1 — 1Institute of Experimental and Applied Physics (IEAP), Kiel University — 2Gruenwald Laboratories GmbH — 34A-Plasma
In this work, an inverted fireball (IFB) [1,2], i.e. a secondary plasma within a hollow grid anode cage, was generated and investigated in a radio frequency plasma. IFBs have a significantly increased plasma density, a homogeneous plasma potential and are, therefore, potentially interesting for application in PECVD processes [3-4]. The ignition conditions for the IFB plasma were determined and special features regarding the influence of the rf plasma on the IFB, in particular the bias voltage of the rf electrode, were studied. The IFB plasma was investigated using a Langmuir probe, optical emission spectroscopy (OES) and a passive thermal probe (PTP) [5]. Good agreement was obtained between the diagnostics for the behavior of the IFB with parameter variation using OES and PTP.
[1] R. Stenzel et al., Plasma Sources Sci. Technol., (17), 2008
[2] R. Stenzel et al., Physics of Plasmas, 18(1), 2011
[3] J. Gruenwald et al., Surface & Coatings Technology, (422), (2021)
[4] J. Gruenwald et al., J. Technol. Space Plasmas, 3(1), (2022)
[5] J. Benedikt et al., Plasma Sources Sci. Technol., 30(3), (2021)
Keywords: inverted fireball; low temperature plasma; rf plasma; anodic plasma; diagnostics