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P: Fachverband Plasmaphysik
P 10: Poster Session I
P 10.7: Poster
Dienstag, 1. April 2025, 16:15–18:15, ZHG Foyer 1. OG
Formation of stable species in atmospheric-pressure coaxial DBDs in argon-tetramethylsilane mixtures — •Marjan Stankov1, Lars Bröcker2, Nickolas Steppan2, Claus-Peter Klages2, Markus M. Becker1, and Detlef Loffhagen1 — 1Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany — 2Institute for Surface Technology, Technische Universität Braunschweig, Braunschweig, Germany
The formation of stable species in atmospheric-pressure dielectric barrier discharges (DBDs) operated in argon with small admixtures of tetramethylsilane (TMS) has been investigated with the help of modelling and experiment for gas residence times up to 8 ms. The DBD reactor studied consists of two borosilicate glass tubes in a coaxial configuration with a gap of 1 mm. It is powered by a 4 kV sinusoidal voltage at 86.2 kHz. The modelling study employs a time-dependent, spatially one-dimensional fluid-Poisson method including a complex plasma chemistry for Ar-TMS mixtures considering about 90 species and 700 reactions. It is accompanied by measurements using Fourier-transform infrared (FTIR) spectroscopy for the analysis of stable molecules in the effluent gas. Satisfactory agreement between calculated and measured number densities of several stable species is generally found. In particular, the analysis for admixtures of up to 100 ppm TMS reveals that trimethylsilane is the primary silicon-containing species generated and that methane becomes the predominant hydrocarbon. The work has been funded by the Deutsche Forschungsgemeinschaft (DFG) - project number 504701852.
Keywords: Dielectric barrier discharge; Atmospheric pressure; Argon; Tetramethylsilane