Göttingen 2025 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 19: Low Pressure Plasmas and their Applications II
P 19.2: Vortrag
Donnerstag, 3. April 2025, 11:30–11:45, ZHG006
Investigations of EUV-induced low density hydrogen plasma in a stand-alone high-intensity irradiation setup — •Adelind Elshani1, Linus Nagel1, Ismael Gisch1, Sascha Brose1,2, Hendrik Kersten3, Annika Bonhoff1, Thorsten Benter3, and Carlo Holly1,2 — 1RWTH Aachen University TOS, Aachen — 2Fraunhofer Institute for Laser Technology ILT, Aachen — 3University of Wuppertal, Physical and Theoretical Chemistry, Wuppertal
The interaction of high-intensity EUV radiation with low-pressure hydrogen gas induces a low-density hydrogen plasma. Understanding the underlying chemical and dynamic processes is essential yet complicated due to plasma formation complexity. Influencing variables are often correlated, making it challenging to investigate relevant quantities independently in existing setups. Investigations that decouple these variables are crucial for a deeper understanding of EUV-induced plasmas. The developed stand-alone high-intensity irradiation setup (EUV-HIEX) reduces complexity and allows the investigation of fundamental dependencies with mostly unbiased parameters. High-intensity exposures are achieved with high spectral purity around 13.5 nm, high vacuum quality, and symmetrical vacuum chamber geometry. Coupling diagnostics enables detailed studies of plasma-induced chemistry and dynamics. Additionally, a modeling framework is developed to link experimental data with theoretical models. The presentation covers the key components of the EUV-HIEX setup, the modeling framework, and the first experimental results, along with an analysis of simulation results regarding electron dynamics.
Keywords: EUV-induced plasma; Plasma diagnostics; Plasma simulation; Molecular processes; Mass spectrometry