Göttingen 2025 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 19: Low Pressure Plasmas and their Applications II
P 19.3: Vortrag
Donnerstag, 3. April 2025, 11:45–12:00, ZHG006
Characterization of a combination sensor for the diagnostic of process plasmas — •Daniel Zuhayra1, Caroline Adam1, Michael Weise2, Thomas Trottenberg1, and Holger Kersten1 — 1Christian-Albrechts-Universität zu Kiel — 2Optotransmitter-Umweltschutz-Technologie e.V.
Energy and particle fluxes significantly impact the surface properties of a substrate in contact with a plasma. Therefore, process control of these parameters by plasma diagnostic methods is of special interest for industrial applications. In this study, we characterized an in-house build, combination diagnostic comprised of a Retarding-Field-Analyzer (RFA) and a Passive-Thermal-Probe (PTP), called Retarding-Field-Thermal-Probe (RFTP), for the study of energy and particle fluxes. The PTP acts as the collector of the RFA and, thus, enables the nearly simultaneous measurement of ion energy distribution and energy influx. Thereby, it is possible to split the energy flux contributions of ions and neutrals. The functionality of the diagnostic was tested in a capacitively coupled plasma (CCP) at a frequency of 13.56 MHz, a conventional direct current magnetron (DC-magnetron), a radio frequency magnetron (RF-magnetron) and in HiPIMS at various discharge conditions. The results reveal an operational area for the RFTP at pressure < 10 Pa and moderately high discharge power, limited by the dimensions, heat capacity and grid transparency of the probe.
Keywords: Energy flux; Ion energy distribution; Retarding-Field-Analyzer; Passive-Thermal-Probe; Combination Diagnosic