Göttingen 2025 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 21: Atmospheric Plasmas and their Applications V
P 21.3: Vortrag
Donnerstag, 3. April 2025, 14:30–14:45, ZHG006
Impact of Long-Term Stability of Atmospheric Pressure Plasmas on Vacuum UV Spectroscopy — •Görkem Bilgin1, Luka Hansen1,2, and Jan Benedikt1,2 — 1Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany — 2Kiel Nano, Surface and Interface Science KiNSIS, Kiel University, Kiel, Germany
The diagnostic of vacuum ultraviolet (VUV) photons generated by atmospheric pressure plasmas is challenging due to strong absorption of VUV photons in air and common window materials like lithium fluoride (LiF) and magnesium fluoride (MgF2) [1].
Ultra-thin silicon nitride (Si3N4) membranes (20 nm) can withstand the pressure gradient and are resistant to plasma exposure, enabling VUV spectroscopic measurements.
During the operation of a capillary jet plasma source [2], the electrodes and plasma heat up, altering matching and reducing power input to the plasma.
Stable operating conditions are essential to investigate potential changes in the Si3N4 membranes (e.g., chemical composition, transmission).
Therefore, the existing setup was upgraded with a liquid cooling system.
VUV spectra with and without cooling highlight the need for active cooling to ensure stable operation.
A stable VUV photon source is essential for studying long-term effects on the membrane.
Additionally, the plasma source’s tunability is shown by measuring VUV spectra while varying the working gas mixture.
[1] J. Golda et al., 2020 Plasma Process. Polym. 17 201900216
[2] T. Winzer et al., 2022 J. Appl. Phys. 132 183301
Keywords: Vacuum Ultraviolet; Spectroscopy; Atmospheric Pressure Plasma; Capillary Jet; Microplasma