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P: Fachverband Plasmaphysik

P 21: Atmospheric Plasmas and their Applications V

P 21.5: Vortrag

Donnerstag, 3. April 2025, 15:15–15:30, ZHG006

Tunable diode laser absorption spectroscopy of all four Ar*(3p⁵4s) states in a pulsed-operated single-filament dielectric barrier discharge at atmospheric pressure — •Levin Krös¹, Hans Höft¹, Jean-Pierre H. van Helden^1,2, and Ronny Brandenburg^1,3 — ¹Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany — ²Faculty of Physics and Astronomy, Ruhr University Bochum, Bochum, Germany — ³Institute of Physics, University of Rostock, Rostock, Germany

Dielectric barrier discharges (DBDs) are a common plasma source for plasma enhanced chemical vapour deposition (PECVD), i.e. of thin functional films. Excited argon species have sufficient energy to dissociate or ionise molecular species and thus influence the discharge dynamics. Tunable diode laser absorption spectroscopy is utilised to measure absolute number densities of the Ar*(3p⁵4s) states. Detailed knowledge of the population distribution of the four lowest energetically excited states of argon (Ar*(3p⁵4s) states, i.e. the resonance states (1s₂, 1s₄) and the metastable states (1s₃, 1s₅)), is of major interest for the benchmarking of numerical models to tailor the operating parameters for PECVD, e.g., the characteristics of the applied high-voltage pulse and the gas flow rate. We report the first results of density measurements of these states in a pulsed-operated DBD with a 3 mm gas gap flown through with argon at atmospheric pressure. This work is funded by the DFG (project number: 504701852).

Keywords: Tunable diode laser absorption spectroscopy; Single-filament dielectric barrier discharge; Argon metastables; Atmospheric pressure