Göttingen 2025 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 23: Atmospheric Plasmas and their Applications VI

P 23.2: Vortrag

Donnerstag, 3. April 2025, 16:45–17:00, ZHG006

Ion energy distributions of a DBD-plasma jet impinging on surfaces — •Daniel Henze, Laura Chauvet, and Achim von Keudell — Experimental Physics II Reactive Plasmas, Ruhr-Universität Bochum

Ion energy distribution functions (IEDFs) originating from a kHz-DBD plasma helium jet expanding into open air were measured using a molecular beam mass spectrometer (MBMS). The plasma jet produces quickly propagating ionization waves as guided streamers. The species' transition into the MBMS occurs either through a 40μm metallic or 50 μm ceramic orifice. The analysis of the time-resolved IEDFs using the metallic orifice revealed that ions initially impacting on the surface are predominantly sampled at a reference energy, which is determined by the seeding of ions into the supersonic expanding helium beam formed when transitioning into the MBMS. After the impact, ions are continuously sampled at an energy a few 0.1 eVs higher than the reference. This is resolved by postulating a positive space-charge region in front of a positively charged surface. However, using the ceramic orifice, much broader IEDFs are observed. These IEDFs are in agreement with simulations by Babaeva and Kushner [2013 J. Phys. D: Appl. Phys. 46 125201].

Keywords: DBD-plasma Jet; mass spectrometry; IEDFs