Köln 2025 – wissenschaftliches Programm
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HK: Fachverband Physik der Hadronen und Kerne
HK 23: Poster
HK 23.36: Poster
Dienstag, 11. März 2025, 17:30–19:00, Foyer Physik
Large-Scale XYZ Digital Microscope — •Konstantin Münning1, Philip Hauer1,2, Jonathan Kunecke2, Jan Paschek1,2, Benedikt Peter2, and Bernhard Ketzer1,2 — 1Helmholtz-Institut für Strahlen- und Kernphysik, Universität Bonn, Germany — 2Forschungs- und Technologiezentrum Detektorphysik, Universität Bonn, Germany
Micropatterned structures are widely used for precise particle detection and identification. An example are Gas Electron Multiplier (GEM) foils or patterned readout electrodes. A process for producing such microstructured flex circuits has recently been implemented at the Research and Technology Center Detector Physics (FTD) of the University of Bonn. An important step in the production is a rigorous Quality Assurance (QA) process, including optical measurements. Commercially available digital microscopes don’t cover the sizes of recent large-scale structures. Therefore a large-scale digital microscope for cleanroom operation was developed to fill this gap and to allow manual and automatic QA procedures. The XYZ-positioning features 25 µm precision covering 1400 × 1400 mm2 area to fully utilize commercially available granite tables. The 20 Mpixel camera with replaceable optics allows to select suitable resolutions, currently up to 1 µm/pixel. By applying image stitching techniques a full image of up to 2·1012 pixels is possible.
The poster introduces the current setup of the microscope with its unique features and presents recent results of GEM foil QA.
Keywords: Digital microscope; XYZ table; MPGD; Quality Assurance; Cleanroom