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DS: Fachverband Dünne Schichten
DS 1: Thin Film Properties
DS 1.7: Vortrag
Montag, 17. März 2025, 11:15–11:30, H3
Sub-10 nm Nanostructures in Thin Films of a Cylinder-Forming PS-b-PDMS Block Copolymer — •Janna X. Friebel, Harikrishnan Venugopal, Julius Bürger, and Jörg K. N. Lindner — Universität Paderborn, Germany
Block copolymers (BCPs) with a combined Flory-Huggins parameter χN > 10 form ordered domains even at low degrees of polymerization (N), enabling sub-10 nm nanostructures suitable for e.g. nanomasks in microelectronics. However, interfacial energy effects in thin films complicate the direct application of the bulk phase diagram by Bates et al. [1].
This study investigates the morphology of thin PS-b-PDMS high-χ BCP films with NB/NA ≈ 0.25, spin-coated onto silicon, titanium, and chromium substrates (all with their native oxides). The films were top coated with PVA, solvent vapor annealed, PVA stripped, and the PS phase was selectively etched. Cross-sectional TEM reveals hemispherical structures instead of the expected hexagonal arrangement of cylinders, as suspected from SEM and AFM investigation. The energetic reasons for this geometry are discussed.
[1] F. S. Bates et al., Physics Today 52 (1999) 32-38.
Keywords: Block Copolymers; Microphase Separation; Self-Assembly; Cross-Sectional TEM; Sub-10 nm Nanostructures