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DS: Fachverband Dünne Schichten
DS 13: Poster
DS 13.18: Poster
Donnerstag, 20. März 2025, 18:00–20:00, P1
Advanced modeling of X-ray reflectivity for metallic multilayer systems with GenX 3 — •Rico Ehrler1,2 and Olav Hellwig1,2,3 — 1Chemnitz University of Technology, D-09107 Chemnitz, Germany — 2Research Center MAIN, D-09126 Chemnitz, Germany — 3Helmholtz-Zentrum Dresden-Rossendorf, D-01328 Dresden, Germany
X-ray reflectivity (XRR) is a versatile, nondestructive technique for probing thin film systems at grazing incidence, offering insights into layer thickness, roughness, and density. However, due to the inherent phase problem in X-ray techniques, extracting these parameters from the XRR data requires careful sample modeling. Especially for metallic multilayers with a complex microstructure, creating a well parametrized model may be challenging. We explore different modeling approaches using the open-source software "GenX 3"[1] on the example of sputter deposited, magnetic Co/Pt multilayer systems. A simplified model without the complex multilayer structure is found to fit the data surprisingly well, when limiting the XRR to a reasonable range. We then add the actual multilayer, modeled with a damped, periodic function following a graded-interface approach to account for the complex microstructure.[2] Finally, real space transmission electron microscopy (TEM) images are used to motivate and validate the models.
[1] A. Glavic and M. Björck, J. Appl. Cryst., 55, 1063-1071 (2022)
[2] V. Munteanu et al., J. Appl. Cryst., 57, 456-469 (2024)
Keywords: X-ray reflectivity; XRR; Co/Pt multilayer; scattering length density; SLD