Regensburg 2025 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Poster
DS 13.24: Poster
Donnerstag, 20. März 2025, 18:00–20:00, P1
Investigating interfacial mechanisms and switching behavior in GST-124/Sb2Te3 superlattices using Atom Probe Tomography — •Athanasia Piperidou1, Jan Köttgen1, Lucas Bothe2, Lukas Conrads1, Yuan Yu1, and Matthias Wuttig1, 2 — 1I. Institute of Physics (IA), RWTH Aachen University, Germany — 2Peter Grünberg Institute - JARA-Institute Energy Efficient Information Technology (PGI-10), Jülich, Germany
Chalcogenide-based phase-change materials like GeSb2Te4 (GST) are crucial for non-volatile storage technologies due to their rapid and reliable switching. Reducing the energy required for transitions between amorphous and crystalline states can improve device performance significantly, as demonstrated in phase-change memories using superlattices (SLs). Here we investigate the switching behavior of MBE-grown 60nm GST-124/Sb2Te3 SLs. Using a pulsed laser, we induce amorphization and recrystallization processes. Atom Probe Tomography (APT) is used to compare the structural and chemical characteristics of interfaces in recrystallized and as-deposited regions. APT’s three-dimensional, near-atomic resolution reveals changes in morphology and element distribution, shedding light on the mechanisms driving switching. Our results show that the SL structure enhances switching efficiency through unique interfacial mechanisms, offering insights for the design of next-generation memory devices.
Keywords: Phase Change Materials; Atom Probe Tomography; Superlattices; Chalcogenide materials; Optical switching