Regensburg 2025 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Poster
DS 13.32: Poster
Donnerstag, 20. März 2025, 18:00–20:00, P1
An in-situ µGISAXS growth study of CoFeB thin film on ion beam sculptured Si template — •Vishnu Narayan Manoj Kumar1, Praveen Kumar Dubey2, Prasanta Karmakar3, Kristian A Reck4, Benedikt Sochor1, Yusuf Bulut1, Thomas Strunskus4,5, Franz Faupel4,5, Stephan V Roth1,6, Peter Müller Buschbaum7, Ajay Gupta2, and Sarathlal Koyiloth Vayalil1,2 — 1DESY, Notkestr. 85, 22607 Hamburg, Germany — 2UPES, Bidholi, Dehradun, India-248007 — 3VECC, 1/AF, Bidhannagar, Kolkata -700064, India — 4Chair for Multicomponent Materials, Department of Materials Science, Kiel University Kaiserstr. 2, 24143 Kiel, Germany — 5Kiel Nano, Surface, and Interface Science, KiNSIS, Kiel University, Christian-Albrechts Platz 4, 24118 Kiel, Germany — 6Division of Coating Technology, KTH Royal Institute of Technology, Teknikringen 48, 100 44 Stockholm, Sweden — 7Technical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, Garching 85748, Germany
In this work, the growth and structural evolution of CoFeB thin films deposited on nanopatterned Si templates prepared by N2+ ion beam irradiation has been done using in-situ micro GISAXS. Different growth regimes have been identified using appropriate growth models. Thin film is found to replicate the sawtooth ripple geometry of the templates up to a large extent of film thickness near 15nm. Strong uniaxial magnetic anisotropy has been observed in this system. Direction of magnetic easy axis is found to be changing with annealing.
Keywords: Magnetic thin films; Nanopatterns; GISAXS; Magnetic anisotropy