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DS: Fachverband Dünne Schichten

DS 13: Poster

DS 13.34: Poster

Donnerstag, 20. März 2025, 18:00–20:00, P1

Microscale Domain Structures in AlScN Thin Films — •Ella Dieball¹, Nicolas Hayen¹, Otto Lippmann^1,3, Philipp Jordt¹, Niklas Wolff², Lorenz Kienle², Fabian Westermeier⁴, Michael Sprung⁴, and Bridget Murphy^1,4,5 — ¹Institute of Experimental and Applied Physics, Kiel University, Germany — ²Institute of Material Sciences, Kiel University, Germany — ³Helmholtz-Zentrum Hereon, Geesthacht, Germany — ⁴Deutsches Elektronen-Synchrotron DESY, Hamburg, Germany — ⁵Ruprecht Haensel Laboratory, Hamburg, Germany

Thin films of Aluminium-Scandium Nitride (AlScN) are used as central components in magnetoelectric surface-acoustic wave sensors utilized extensively within the Collaborative Research Center 1261 "Biomagnetic Sensing".
High resolution XRD experiments were conducted at microfocus beamline P10 at PETRA III. Bragg diffraction on AlScN thin films grown on GaN was investigated at the [0 0 0 2], [0 0 0 4] and [0 1 -1 5] reflections. The material exhibits an unexpected domain structure on the µm scale, which is associated with Scandium-rich and Scandium-depleted regions.
Additional synchrotron experiments are in planning to further investigate AlScN, e.g. grazing incidence diffraction or absorption measurements around the Scandium K-edge.

Keywords: AlScN; Synchroton XRD; Biomagnetic Sensors