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DS: Fachverband Dünne Schichten
DS 13: Poster
DS 13.35: Poster
Donnerstag, 20. März 2025, 18:00–20:00, P1
In Operando Grazing Incidence Diffraction in AlScN Surface Acoustic Wave Sensors — •Otto Carlos Lippmann1, 2, Nicolas Hayen1, Philipp Jordt1, Jana Meyer5, Fabian Lofink5, Henrik Wolframm4, Didier Wermeille7, Laurence Bouchenoire7, Florian Bertram3, and Bridget Murphy1, 3, 6 — 1Institute of Experimental and Applied Physics, Kiel, Germany — 2Helmholtz-Zentrum Hereon, Geesthacht, Germany — 3Deutches Elektronen Synchrotron, DESY, Hamburg, Germany — 4Faculty of Engineering, Kiel, Germay — 5Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany — 6Ruprecht-Haensel Laboratory, Hamburg, Germany — 7European Synchrotron Radiation Facility, Grenoble, France
Magnetic field sensors based on thin-film surface acoustic wave (SAW) technology are widely utilized in Collaborative Research Center 1261 "Biomagnetic Sensing". The use of Aluminium-Scandium-Nitride (AlScN) as the piezoelectric material allows for significant improvements in device sensitivity.
To investigate the microstructure of AlScN during the excitation of acoustic modes, an in operando setup was developed for high-resolution X-ray diffraction (XRD). This setup induces standing waves and allows the observation of diffraction patterns. A comparison of grazing-incidence diffraction (GID) of the [0 1 3] Bragg reflection between the stationary and operating state shows a shift in the signal peak position. Additional experiments are planned, along with the development of a new setup for time-resolved experiments. These efforts aim to enhance the understanding of SAW propagation in these materials.
Keywords: AlScN; Synchrotron XRD; Functional material; Surface acoustic wave sensor; In Operando