Regensburg 2025 – scientific programme
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DS: Fachverband Dünne Schichten
DS 13: Poster
DS 13.40: Poster
Thursday, March 20, 2025, 18:00–20:00, P1
NaCl-assisted TAC synthesis of MoSe2 films for optical humidity sensor applications — •Blagovest Napoleonov1, Katerina Lazarova1, Dimitrina Petrova1,2, Vladimira Videva1,3, Dimitre Dimitrov1,4, and Vera Marinova1 — 1Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria — 2South-West University Neofit Rilski, Blagoevgrad, Bulgaria — 3Faculty of Chemistry and Pharmacy, Sofia University, Sofia, Bulgaria — 4Institute of Solid State Physics, Bulgarian Academy of Sciences, Sofia, Bulgaria
We present the synthesis of MoSe2 through the Thermal Assisted Conversion (TAC) method with Mo liquid precursor solution composed of MoO3 dissolved in a 1:1 mixture of H2O and H2O2, with NaCl as an additive. The precursor solution enables controlled delivery of Mo during the TAC growth. The presence of NaCl influences the growth kinetics and crystallization during the annealing step. Raman spectroscopy, TEM, AFM and XPS measurements were employed for comprehensive material characterization, revealing the effectiveness of this precursor combination in synthesizing high-quality MoSe2 films. Based on optical reflectance measurements, the MoSe2 films demonstrate sensitivity to relative humidity changes by reflectance variation. These results led to the development of an optical humidity sensor, showcasing the material's potential in sensor applications. Acknowledgements: This work is supported by the Bulgarian Science Fund under the grant number KP-06-COST/15 under the COST Action CA20116 OPERA European Network for Innovative and Advanced Epitaxy.
Keywords: Liquid precursor TAC growth; TMDC material synthesis; Humidity-Driven Optical Modulation