Regensburg 2025 – scientific programme
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DS: Fachverband Dünne Schichten
DS 13: Poster
DS 13.41: Poster
Thursday, March 20, 2025, 18:00–20:00, P1
Functionalization of Al-doped ZnO nanolayers for display applications — •Stefani Bogoeva1, Vladimira Videva1, Dimitrina Petrova1,2, Vera Marinova1, and Dimitre Dimitrov1,3 — 1Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria — 2Faculty of Engineering, South-West University, 2700 Blagoevgrad, BG — 3Institute of Solid State Physics, BAS, 1784 Sofia, BG
The integration of highly transparent and conductive thin films into functional structures and devices plays an important role in the advancement of next-generation technologies. Here we report about Aluminum doped ZnO (AZO) thin films synthesized on different substrates using the atomic layer deposition (ALD) technique, which allows excellent conformality. The effect of post-deposition treatments on the optical and electrical properties of the films was studied using variety of characterization techniques.
Based on the above characteristics, integration of AZO layers in liquid crystal (LC) devices and Polymer Dispersed Liquid crystals (PDLC) structures are demonstrated, with measured electro-optical characteristics and response time. Implementation of AZO layers opens prospective applications for future ITO-free optoelectronics.
Acknowledgments The research was supported by the Scientific Research Fund project No. KP-06-*-58/12, as well as the distributed scientific infrastructure INFRAMAT, part of the National Roadmap of Bulgaria for scientific infrastructure, financially supported by the Ministry of Education and Science.
Keywords: Atomic Layer Deposition; Hall measurments; Liquid crystal; Polymer Dispersed Liquid crystals