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DS: Fachverband Dünne Schichten

DS 4: 2D Materials and their Heterostructures II (joint session DS/HL)

DS 4.6: Vortrag

Dienstag, 18. März 2025, 11:15–11:30, H3

Rapid MOCVD synthesis of stratified MoS2 and WS2 2D heterostructures — •Nikolas Dominik, Sebastian Klenk, Cormac Ó Coileáin, and Georg S. Duesberg — Institute of Physics, University of the Bundeswehr Munich & SENS Research Center, München, Deutschland

The two-dimensional (2D) structure of layered materials such as the transition metal dichalcogenides MoS2 and WS2, imparts exceptional electrical, mechanical and optical properties. This makes them particularly interesting for electronic, photovoltaic and sensing application. Van der Waals heterostacks, composed of assembled 2D materials, expand on the possible range of properties, and so have attracted extensive attention due to factors such as ultrafast carrier transport and high bandgap tunability.

Here we present metal-organic chemical vapour deposition (MOCVD) synthesis of MoS2/WS2 combination heterostructures using a highly controllable industrial-scale multi-precursor system, thus avoiding the laborious need for manual stacking. We show how this synthesis method allows the creation of clearly defined and highly ordered stacks by producing a 7-layer combination structure below 10 nm. We explore the characteristics of these films using Raman spectroscopy and XPS, EDX, TOF-SIMS and microscopy techniques.

Keywords: 2D Material; MOCVD; WS2; MoS2; Heterostructure