Regensburg 2025 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 5: Thin Oxides and Oxide Layers

DS 5.4: Vortrag

Dienstag, 18. März 2025, 14:45–15:00, H3

Multinary compositionally graded, spatially addressable materials libraries by pulsed laser deposition — •Jorrit Marius Bredow, Marius Grundmann, and Holger von Wenckstern — Felix Bloch Institute for Solid State Physics, Leipzig University

The discovery of novel, functional materials is increasingly based on the investigation of multinary materials with large composition spaces. Therefore, combinatorial synthesis and high-throughput characterization methods are preferable for the discovery of functional multi-component materials. Here, pulsed laser deposition (PLD) from segmented targets allows the synthesis of spatially addressable materials libraries (SA-ML) with continuous compositional gradients^[1].

We demonstrate that PLD is a viable method for synthesizing multi-component SA-ML using n-fold azimuthally segmented targets. We present a roadmap for the fabrication of fivefold segmented targets using MgO, CoO, NiO, CuO, and ZnO, which can be readily applied to different material combinations. Moreover, we compare two approaches to target and deposition process design for PLD of SA-ML. The composition of the SA-ML is determined by high-throughput energy dispersive X-ray spectroscopy confirming the successful synthesis of a fivefold compositionally graded SA-ML by combinatorial PLD. Aditionally, the height distributions and elemental compositions are simulated with the thickness distribution parameters of the binary oxides and the simulation results are compared to the experimental data.

^[1] H. von Wenckstern, Z. Zhang, F. Schmidt, J. Lenzner, H. Hochmuth, and M. Grundmann, CrystEngComm, 15, 10020, 2013.

Keywords: high-entropy oxides; pulsed laser deposition (PLD); high-entropy alloys; materials libraries; oxide thin films