Regensburg 2025 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 46: Optical Properties
HL 46.9: Vortrag
Donnerstag, 20. März 2025, 12:15–12:30, H15
Luminescent Microthermometers Based on ALD-encapsulated Ga2O3:Cr DBR Microcavities — •Ruben Neelissen1, Daniel Carrasco1,2, Anton Schäning1, Marco Schowalter1, Andreas Rosenauer1, Emilio Nogales2, Bianchi Mendez2, Martin Eickhoff1, and Manuel Alonso-Orts1 — 1Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany. — 2Departamento de Fisica de Materiales, Plaza Ciencias 1, Universidad Complutense de Madrid, 28040 Madrid, Spain.
The ability to measure temperature non-invasively, accurately and reliably is an ever reoccurring challenge in various fields such as micro- and nanosystems. Luminescent thermometry sensors can operate in environments where electronic counterparts are ineffective, thanks to their capability for remote sensing while being minimally intrusive.
Gallium oxide (β-Ga2O3) is a semiconductor with an ultra-wide bandgap of 4.8 eV and high resilience. Chromium-Ions (Cr3+) in β-Ga2O3 result in two well-defined peaks, superimposed to a red-NIR emission, which can be utilized for temperature sensing.
In this work [1] it is demonstrated how confined light of β-Ga2O3:Cr microcavities (MCs) can be enhanced by encapsulating them in ALD-grown distributed Bragg reflectors (DBRs). With increasing temperature, the resonant wavelength redshifts due to changes in both the refractive index and the optical length of the MCs. A temperature accuracy of <0.5 ∘C for temperatures above -80 ∘C is demonstrated.
[1] M. Alonso-Orts et al. In: Advanced Materials Technologies (2024), p. 2400881.
Keywords: Microthermometer; Microcavity; Gallium oxide; Photoluminescence; ALD