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HL: Fachverband Halbleiterphysik

HL 58: Nitrides: Preparation and Characterization II

HL 58.4: Vortrag

Freitag, 21. März 2025, 10:15–10:30, H14

Physical properties and thermal stability of zirconium platinum nitride thin films — Rebecca Gallivan¹, Ana Michelini¹, Nensi Toncich¹, Nerea Abando Beldarrain¹, Julia Manser¹, Arnold Müller², Christof Vockenhuber², and •Henning Galinski¹ — ¹Laboratory for Nanometallurgy, Department of Materials, ETH Zurich,8093 Zurich, Zurich, Switzerland — ²Laboratory of Ion Beam Physics, Department of Physics, ETH Zurich, 8093 Zurich, Zurich, Switzerland

By providing new functionality, ternary transition metal nitrides (TMNs) have the potential to greatly broaden the material design space. Nevertheless, the majority of systems have only been studied computationally, and translation to experimental synthesis is restricted by a lack of knowledge about their stabilizing mechanisms. In this talk, we discuss the fabrication of ternary Zr-Pt-N thin films and examine their physical properties [1]. We show that Pt replaces nitrogen on the nonmetallic sublattice, destabilizing the rock salt structure and forming a complicated cubic phase. Additionally, we observe the exsolution of Pt nano precipitates from the Zr-Pt-N films upon annealing as well as degradation in the nitridic film’s thermal stability. Even at low concentrations, Pt facilitates a solid reaction with the Si substrate that is otherwise inaccessible in ZrN films.

References: [1] Appl. Phys. Lett. 125, 221901 (2024)

Keywords: transition metal nitrides; physical properties; ion beam analysis; phase transitions; density functional theory