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O: Fachverband Oberflächenphysik

O 66: Vacuum Science Technology: Theory and Applications

O 66.5: Vortrag

Mittwoch, 19. März 2025, 16:30–16:45, H8

Comparative Measurements of Ion Pump pumping speed according to ISO/DIS 3556 and DIN 28429 — •Marcel Herrmann, Kristian Kirsch, Marco John, Christoph Bartlitz, Andreas Trützschler, and Klaus Bergner — VACOM Vakuum Komponenten & Messtechnik GmbH, In den Brückenäckern 3, 07751 Großlöbichau

Sputter Ion Pumps (SIP) offer an appealing strategy to efficiently maintain ultra-high and extremely-high vacuum conditions in a vacuum chamber. The pumping speed, i.e. the volume flow of gas extracted from the vacuum in a specific period of time, can be determined according to various standards. However, recorded pumping speeds may vary severely, depending on the standard chosen and the detailed procedure applied. This talk compares experimentally obtained pumping speeds of several SIPs, acquired according to the most commonly applied standards, DIN 28429:2014 05 and ISO/DIS 3556 1.2(1992).

Keywords: Sputter Ion Pump; Ultra-high vacuum; Metrology; Pumping Speed; Ion Getter Pump