Regensburg 2025 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 66: Vacuum Science Technology: Theory and Applications
O 66.7: Vortrag
Mittwoch, 19. März 2025, 17:00–17:15, H8
Miniaturized Pirani vacuum sensor with active heat-loss compensation — •Julian Eiler1, Stefan Weber2, Peter Gerlesberger2, Heinz Plöchinger2, and Rupert Schreiner1 — 1Faculty of Applied Natural Sciences and Cultural Studies, OTH Regensburg, D-93053 Regensburg, Germany — 2Thyracont Vacuum Instruments GmbH, D-94036 Passau, Germany
Pirani sensors measure the thermal conductivity of the residual gas in a vacuum by creating a thermal gradient between a heated sensor element and a heat sink. The heat flux from the sensor element to the heat sink over the residual gas is a measure of the vacuum and can be determined by the electrical power applied.
In addition to the heat flux over the gas, there are further energy losses from the heating structure due to radiation and parasitic heat fluxes via the suspensions of the sensor element. These losses reduce the sensitivity of the sensor.
For this reason, a Micro-Pirani sensor in the shape of a micro-hotplate was developed that actively compensates the heat flux via the suspensions. This was achieved by placing additional heating structures on the suspensions, which interrupt the heat flow from the sensor element via the suspensions during operation. This active compensation improves the sensitivity at low pressures, enabling vacuum measurements from atmospheric pressure down to 10e-6 mbar.
Keywords: vacuum gauge; Micro-Pirani; pressure sensor; MEMS