Aachen PK 2003 – wissenschaftliches Programm
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K: Kurzzeitphysik
K 5: Short time-scale physics, posters
K 5.4: Poster
Donnerstag, 20. März 2003, 17:30–19:15, Foyer
Laboratory size analysis using compact plasma sources — •Juri Barthel, Konstantin Walter, Klaus Bergmann, and Willi Neff — Fraunhofer ILT, Steinbachstr. 15, 52074 Aachen
Radiation of the spectral range from 1 to 50 nm (XUV) has the potential to
explore new fields of application for nano-analysis. Confronting the
problem of tuning source, interfaces, optics and detectors to compose a
system, concrete examples of applications are given.
A grazing incidence collector is designed and adjusted to a compact plasma
source in the view of high photon flux, broad spektral range for
spectroskopic analysis and use as a beamsplitter. Setups for transmission
and reflection measurements are presented.