Dresden 2006 – wissenschaftliches Programm

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DF: Dielektrische Festkörper

DF 3: Poster Session

DF 3.5: Poster

Montag, 27. März 2006, 09:30–17:00, P1

Theoretical investigation of fullerene-based ultralow-k dielectrics — •Yuekui Wang¹, Gotthard Seifert¹, and Helmut Hermann² — ¹TU Dresden, Institute for Physical Chemistry and Electrochemistry, Bergstr. 66b, D-01062 Dresden — ²IFW Dresden, P.O.Box 27 01 16, D-01171 Dresden

It is one of the urgent problems in microelectronics to develop insulating materials with dielectric constants of less than 2 for future application in semiconducting circuits. Networks of fullerenes connected by bridge molecules are a new class of hypothetical insulating materials with very low static dielectric constant k. It is shown that it is possible to design such materials with k-values of about 1.5. The results are obtained combining total energy and structure optimization calculations.