Dresden 2006 – scientific programme
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DF: Dielektrische Festkörper
DF 3: Poster Session
DF 3.5: Poster
Monday, March 27, 2006, 09:30–17:00, P1
Theoretical investigation of fullerene-based ultralow-k dielectrics — •Yuekui Wang1, Gotthard Seifert1, and Helmut Hermann2 — 1TU Dresden, Institute for Physical Chemistry and Electrochemistry, Bergstr. 66b, D-01062 Dresden — 2IFW Dresden, P.O.Box 27 01 16, D-01171 Dresden
It is one of the urgent problems in microelectronics to develop insulating materials with dielectric constants of less than 2 for future application in semiconducting circuits. Networks of fullerenes connected by bridge molecules are a new class of hypothetical insulating materials with very low static dielectric constant k. It is shown that it is possible to design such materials with k-values of about 1.5. The results are obtained combining total energy and structure optimization calculations.