Regensburg 2007 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 14: Si/Ge
HL 14.6: Vortrag
Montag, 26. März 2007, 17:15–17:30, H14
Functional Spin-Coated Nanocrystalline Silicon Layers on Plastic Substrates — •Robert Lechner1, Roland Dietmüller1, Andre R. Stegner1, Rui N. Pereira1, Martin S. Brandt1, André Ebbers2, Frank-Martin Petrat2, Martin Trocha2, Hartmut Wiggers3, and Martin Stutzmann2 — 1Walter Schottky Institut, Technische Universität München, Am Coulombwall 3, 85748 Garching — 2Degussa AG, Paul-Baumann-Str. 1, 45764 Marl — 3Universität Duisburg-Essen, Institut für Verbrennung und Gasdynamik, Lotharstr. 1, 47048 Duisburg
Semiconducting silicon nanoparticles are possible candidates for various applications in the field of printable electronics and for low cost solar cells. Its natural abundance and non-toxicity make silicon the favorable choice out of a large variety of nanoparticle materials which in principle enable high carrier mobility and stability under atmospheric conditions.
Here, we present results obtained by pulsed laser annealing of spin-coated silicon nanoparticle dispersions on flexible plastic substrates. These nanoparticles are successfully doped during their formation in a microwave reactor by the addition of diborane and phosphine to the precursor gases. The structural properties of the films before and after the laser treatment are discussed and the conductivity is found to increase by several orders of magnitude. Furthermore, spectrally resolved photoconductivity allows a detailed analysis of electronic transport in spin-on nanoparticular silicon films. In addition, device concepts based on these films will be discussed.