Regensburg 2010 – scientific programme
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DS: Fachverband Dünne Schichten
DS 38: Layer Properties: Electrical, Optical and Mechanical Properties
DS 38.10: Talk
Thursday, March 25, 2010, 16:15–16:30, H8
Characterization of ion beam modified polyimide layers — •Daniel Friedrich1, Marcel Michling1, Dieter Schmeißer1, Yuri Koval2, and Paul Müller2 — 1Brandenburgische Technische Universität Cottbus, Angewandte Physik/Sensorik, K.- Wachsmann-Allee 1, 03046 Cottbus — 2Universität Erlangen Nürnberg, Experimental Physik/Supraleitung, Erwin-Rommel-Str. 1, 91058 Erlangen
Ion beam modified polyimide show high conductivity. In our investigation we focus on the electronic structure and the element composition, in order to understand the mechanism of conductivity. In our experiments we use the methods NEXAFS and PES. The measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin. We find an increase of the sp2 hybridized graphite contribution, after low Ar+ ion doses bombardment while the temperature of the samples is varied from 300 K to 650 K. In addition we follow the He+ bombardment induced changes by in-situ monitoring of the O1s, N1s content in the polyimide films.