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DS: Fachverband Dünne Schichten

DS 38: Layer Properties: Electrical, Optical and Mechanical Properties

DS 38.10: Vortrag

Donnerstag, 25. März 2010, 16:15–16:30, H8

Characterization of ion beam modified polyimide layers — •Daniel Friedrich¹, Marcel Michling¹, Dieter Schmeißer¹, Yuri Koval², and Paul Müller² — ¹Brandenburgische Technische Universität Cottbus, Angewandte Physik/Sensorik, K.- Wachsmann-Allee 1, 03046 Cottbus — ²Universität Erlangen Nürnberg, Experimental Physik/Supraleitung, Erwin-Rommel-Str. 1, 91058 Erlangen

Ion beam modified polyimide show high conductivity. In our investigation we focus on the electronic structure and the element composition, in order to understand the mechanism of conductivity. In our experiments we use the methods NEXAFS and PES. The measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin. We find an increase of the sp2 hybridized graphite contribution, after low Ar⁺ ion doses bombardment while the temperature of the samples is varied from 300 K to 650 K. In addition we follow the He⁺ bombardment induced changes by in-situ monitoring of the O1s, N1s content in the polyimide films.