Regensburg 2010 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers

DS 9.33: Poster

Montag, 22. März 2010, 15:00–17:30, Poster D1

Preparation and investigation of epitaxial grown CaRuO₃ / SrTiO₃/ CaRuO₃ - structures — •Janine Fischer, Veit Große, Andreas Siebert, Frank Schmidl, and Paul Seidel — Friedrich-Schiller-Universität, Institut für Festkörperphysik, Helmholtzweg 5, 07743 Jena

We deposited layer systems of CaRuO₃ / SrTiO₃ / CaRuO₃ on LaAlO₃ using PLD by variation of the SrTiO₃ film thickness. The prepared layer systems were characterised via X-rays and AFM. We prepared capacitor structures from these systems after optimisation of the preparation parameters - e.g. substrate temperature, laser energy and oxygen pressure. The temperature dependence of the conductivity and the dielectric properties of the SrTiO₃ layers from these structures were investigated. In addition we present first measurements.