Parts | Days | Selection | Search | Downloads | Help
DS: Fachverband Dünne Schichten
DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers
DS 9.33: Poster
Monday, March 22, 2010, 15:00–17:30, Poster D1
Preparation and investigation of epitaxial grown CaRuO3 / SrTiO3/ CaRuO3 - structures — •Janine Fischer, Veit Große, Andreas Siebert, Frank Schmidl, and Paul Seidel — Friedrich-Schiller-Universität, Institut für Festkörperphysik, Helmholtzweg 5, 07743 Jena
We deposited layer systems of CaRuO3 / SrTiO3 / CaRuO3 on LaAlO3 using PLD by variation of the SrTiO3 film thickness. The prepared layer systems were characterised via X-rays and AFM. We prepared capacitor structures from these systems after optimisation of the preparation parameters - e.g. substrate temperature, laser energy and oxygen pressure. The temperature dependence of the conductivity and the dielectric properties of the SrTiO3 layers from these structures were investigated. In addition we present first measurements.