Berlin 2012 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 40: Impurities / Amorphous Semiconductors
HL 40.7: Talk
Tuesday, March 27, 2012, 13:00–13:15, EW 015
Diffusion of Cu (I) in amorphous In2S3 thin films investigated by Rutherford backscattering spectroscopy — •Albert Juma1, Paul Pistor1, Thomas Dittrich1, and Elke Wendler2 — 1Helmholtz-Centre Berlin for Material and Energy, Hahn-Meitner-Platz 1, 14109 Berlin, Germany — 2Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
Amorphous In2S3 thin films can be used in charge-selective layer systems for example in contact with chalcopyrite absorber or in contact with CuSCN hole conductor. Diffusion of Cu (I) plays a crucial role for the electronic properties of charge-selective contact systems with In2S3. In our experiments CuSCN was sprayed as a Cu (I) source on evaporated amorphous In2S3 thin films (layer thickness 100 nm) and the annealing temperature was varied and annealing time was fixed. After annealing CuSCN was etched away in pyridine solution. The Cu concentration profiles were obtained from Rutherford backscattering (He+) measurements. Temperature dependent diffusion coefficients were deduced from the measurements. The value of the exponential prefactor was of the order of 108 cm2s−1 and the activation energy amounted to about 0.9 eV. A suggestion on the diffusion mechanism will be drawn.