Bremen 2017 – scientific programme
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P: Fachverband Plasmaphysik
P 27: Low Temperature Plasmas
P 27.1: Invited Talk
Thursday, March 16, 2017, 14:00–14:30, HS 2010
High Rate MW_PECVD of SiOx and ZnO protective coatings on polycarbonate — •Stefan Merli — IGVB Stuttgart