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MI: Fachverband Mikrosonden
MI 6: Symposium Nanostructuring Beyond Conventional Lithography
(MI with DS, DF, HL, MM and VA)
Mittwoch, 22. März 2017, 15:00–17:45, HSZ 02
15:00 | MI 6.1 | Hauptvortrag: The Limits to Lithography: How Electron-Beams Interact with Materials at the Smallest Length Scales — •Karl K. Berggren | |
15:30 | MI 6.2 | Hauptvortrag: High precision fabrication for light management at nanoscale — •Saulius Juodkazis and Armandas Balcytis | |
16:00 | MI 6.3 | Hauptvortrag: Directed self-assembly of performance materials — •Paul Nealey | |
16:30 | 15 min. break | ||
16:45 | MI 6.4 | Hauptvortrag: Nanometer accurate topography patterning using thermal Scanning Probe Lithography — •Armin W. Knoll | |
17:15 | MI 6.5 | Hauptvortrag: High resolution 3D nanoimprint lithography — •Hartmut Hillmer | |