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SKM 2023 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 12: Poster

DS 12.46: Poster

Mittwoch, 29. März 2023, 17:00–19:00, P3

Preparation and characterization of Cu-Te phases using focused ion beam — •Nils Braun1, Vladimir Roddatis2, Agnes Mill1, Sonja Cremer1, Hagen Bryja1, Lennart Voss3, Lorenz Kienle3, and Andriy Lotnyk1,4,51Leibniz Institute of Surface Engineering e.V. (IOM) — 2GFZ German Research Centre for Geosciences — 3Institute for Materials Science, Faculty of Engineering, University of Kiel — 4Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University — 5College of Physics and Optoelectronic Engineering, Harbin Engineering University

In this work, we prepared different nanoscale Cu-Te phases from Cu - Sb2Te3 system using FIB. Copper chalcogenides have shown promising thermoelectric properties, e.g. high efficiency and tunability. Sb2Te3 thin layers are epitaxially grown on p-type Si (111) substrates and polycrystalline Sb2Te3 thin film are grown on a SiO2 coated wafer using PLD. A standard cross-section FIB preparation method is used. Samples are investigated using advanced TEM methods and XRD. Dependent on beam current used during FIB lamella preparation and Sb2Te3 layer thickness, hole formation in the Cu layer, thickness change and chemical changes of the Sb2Te3 layers are observed. In specimen prepared from the heated samples Sb2Te3 and Cu-Te grains are found. In polycrystalline Sb2Te3 specimen the intercalation of Cu and formation of new Cu-Te phases is observed. We thank P. Hertel for magnetron sputtering. We acknowledge the financial support by the German Research Foundation (DFG 448667535).

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