SKM 2023 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 8: Thin Film Properties III

DS 8.4: Vortrag

Dienstag, 28. März 2023, 12:15–12:30, SCH A 315

Rutile CuTiO₂ alloy thin films: lowered growth temperature and retained optical properties. — •Hao Lu^1,2, Martin Becker^1,2, and Peter J. Klar^1,2 — ¹Institute of Experimental Physics I, Justus-Liebig-University, Giessen, Germany — ²Center for Materials Research (ZfM), Justus-Liebig-University, Giessen, Germany

Titanium dioxide(TiO₂) with a rutile structure and suitable bandgap may be advantageously employed as buffer layer and anti-reflection layer in VO₂-based smart windows coated on float glass by sputter deposition. The phase transition of the thermodynamically metastable phases, anatase and brookite, into the stable rutile phase occurs in pristine TiO₂ at temperatures about 600^∘C, which is higher than the melting point of float glass. Hence, we need to significantly reduce the growth temperature of rutile TiO₂ in order to deposit it as the film on float glass substrates.
Cu doping has been reported as a means for achieving this goal. We study series of TiO₂:Cu thin-film samples deposited on float glass to assess the growth window for rutile TiO₂:Cu deposited at temperature below 600^∘C. The samples are compared with reference TiO₂ thin-films deposited under the same conditions in terms of crystal structure and optical properties.