SKM 2023 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 14: 2D Materials III (joint session HL/CPP)
HL 14.7: Talk
Tuesday, March 28, 2023, 11:15–11:30, POT 81
Atomic layer deposition of horizontal and vertical MoS2/WS2 heterostructures — •Christian Tessarek, Tim Grieb, Andreas Rosenauer, and Martin Eickhoff — Institut für Festkörperphysik, Universität Bremen
Beyond the properties of single two-dimensional (2D) layers, heterostructures made of 2D transition metal dichalcogenides promise new properties based on moiré physics and interlayer excitons.
Vertical and horizontal MoS2 and WS2 heterostructures were grown by atomic layer deposition (ALD) and analyzed by Raman and photoluminescence spectroscopy. The influence of the the ALD growth sequence, i.e. MoS2/WS2 vs. WS2/MoS2, was investigated. Elemental distribution of Mo and W in a horizontal heterostructure was studied by high resolution transmission electron microscopy and energy-dispersive X-ray spectroscopy. Additional high temperature annealing was performed to improve the structural and optical properties of the layers.